Spatial inhomogeneity of plasma polymer properties for deposition inside small diameter tubing at low pressures : its (A) use for process diagnosis and (B) elimination by "Residence Time Synchronized Pulsing" / by Nancy Elaine Barr.
Spatial inhomogeneity of plasma polymer properties for deposition inside small diameter tubing at low pressures : its (A) use for process diagnosis and (B) elimination by "Residence Time Synchronized Pulsing" / by Nancy Elaine Barr.